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A method of preparing oxidation catalyst comprising cerium oxide and a metal selected from the group consisting of gold, platinum palladium, tin, ruthenium, or nickel by sputtering cerium oxide and a metal from a target to a substrate wherein the cerium oxide and a metal material are sputtered to the substrate concurrently from at least one target under an argon atmosphere t form a layer of cerium oxide including dispersed atoms of the metal Specific Au-CeO2 and Pt-CeO2 catalyst are prepared by using this method.

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